Dry compressing Screw Vacuum Pumps for critical applications
Dreifert, Thomas; Buhlmann , Klaus
Germany

Since 2003 Oerlikon Leybold Vacuum produces dry compressing Screw Vacuum Pumps named „ScrewLine“. These fore-vacuum pumps work totally without oil in the pumping chamber. They are designed for a wide range of applications featuring very clean vacuum, high robustness, low cost of ownership and low working pressures.
The main design feature of the ScrewLine is the concept of cantilevered rotors. Cantilevered rotors have their bearings only on the exhaust side of the pump inside the gear-box. On the inlet- or vacuum-side therefore neither bearings nor shaft seals are needed. This results in a very high robustness against particles or aggressive gases. Additionally the design by principle prevents contamination of the vacuum installation by oil or grease from the lubrication of bearings on the inlet side of the pump.
The rotors of ScrewLine pumps are internally cooled by circulating oil. This result in outstanding low rotor temperatures and a very uniform temperature profile without hot spots. The pumps are therefore ideal for pumping of gases or vapours that are sensible concerning high temperatures (e.g. Acetylene, Chlorinated Hydrocarbons). The cooling concept further results into almost constant clearances between rotors and housing. Constant performance under all ambient conditions and gas loads is therefore guaranteed. Pumping of heavy gases as Argon is possible without limitations. Also for light gases as Helium or Hydrogen the pumps show outstanding vacuum performance.
Some examples will show that ScrewLine pumps are suited for a very wide range of applications. Concerning cost of ownership and pump-uptime significant advantages compared to oil sealed pumps can be achieved. Based on the described features the ScrewLine is already a well established product in heavy industrial- as well as in very clean R&D-applications.
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