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In this contribution we present the use of locally oxidized octadecyltrichlorosilane (OTS) and bromo terminated alkyl silane monolayers on silicon as templates for chemical surface modification and self-assembly routines. By applying a bias voltage to a SAM of OTS via a conductive AFM tip carboxylic acids functionalities are formed. These groups are used as starting points for the assembly of functional materials on spatial defined patterns using a combination of covalent and non-covalent interactions. We demonstrate the assembly of nanoparticles, nanowires, proteins and bilayers. In contrast to OTS the bromo silane monolayers are used directly as chemically active SAMs for surface modifications. This includes the local assembly of dyes using Huisgen 1,3-dipolar cycloaddition of acetylenes and azides moieties obtained by substitution of the terminal bromine functionality by sodium azide. Described surface reactions are characterized by infrared spectroscopy, XPS and UV/vis. On the other hand the bromo functionalities can function as initiators for the controlled polymerization of styrene using ATRP, which results in the formation of spatial defined polymer brushes. |