High-resolution compact x-ray microscopy
Bertilson, Michael C.; Takman, Per A C; Stollberg, Heide; Holmberg, Anders; Lindblom, Magnus; Vogt, Ulrich; Hertz, Hans M
Sweden

X-ray microscopy in the water-window region (ë=2.3-4.4 nm) based on diffractive zone plate optics is an attractive technique for high-resolution imaging. Conventional x-ray microscopes are based on synchrotron radiation sources. However, many scientists would benefit from having an x-ray microscope as one imaging tool among others in their own laboratory. For this purpose we developed and demonstrated the first compact x-ray microscope with sub-µm resolution [1]. In this presentation we describe the improved second-generation compact full-field x-ray transmission microscope. It is based on a compact liquid-jet-target laser-plasma source, featuring operation at ë=3.37 nm [2] or ë=2.48 nm [3]. The mechanical and optical design is user-friendly and allows stable operation [4]. Thin ~3 µm carbon-containing samples can be imaged with good contrast using the ë=3.37 nm wavelength, whereas thicker ~10 µm biological objects require operation at ë=2.48 nm where the x-ray transmission is higher. When operating at ë=3.37 nm, x-rays are focused onto the sample using a normal-incidence multilayer mirror condenser [5]. Due to poor performance of such mirrors at ë=2.48 nm, a large ~4.5 mm diameter condenser zone plate [6] is employed. The sample holder is mounted in a helium atmosphere and allows imaging of both dry and wet specimens. Future systems will include cryo-fixation of the sample. The imaging of the sample onto a CCD detector is performed by in-house fabricated state-of-the-art nickel micro zone plates with outer zone widths down to 25 nm [7]. We show that this microscope is capable of resolving 60 nm period gratings with good contrast [4] and demonstrate the performance of the instrument by presenting images from both dry and wet samples.

1. M. Berglund et.al., J. Microsc. 197, 268 (2000)
2. U. Vogt et.al., Appl. Phys. B 78, 53-58 (2004)
3. P. A. C. Jansson et.al., Rev. Sci. Instrum. 76, 43503-1 (2005)
4. P. A. C. Takman et.al., accepted by J. Microsc. (2007)
5. H. Stollberg et.al., Rev. Sci. Instrum. 77, 123101-1 (2006)
6. S. Rehbein et.al., J. Vac. Sci. Technol. B 22, 1118-1122 (2004)
7. A. Holmberg et.al., IPAP Conference Series 7: X-ray microscopy, 124-126 (2006)
back